Pelapisan Ni-Cr Dan Aluminium Pada Baja Karbon St 40 Dengan Menggunakan Metode Sputtering

Utomo, Bagus Radiant and , Tri Widodo Besar Riyadi. ST. MSc. Ph.D (2017) Pelapisan Ni-Cr Dan Aluminium Pada Baja Karbon St 40 Dengan Menggunakan Metode Sputtering. Skripsi thesis, Universitas Muhammadiyah Surakarta.

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Abstract

Deposition of Ni-Cr and Al thin film on steel carbon ST 40 substrate has been done by sputtering dc technique. In sputtering technique, the Ni-Cr and Al target and steel carbon ST 40 substrate are put down on cathode and anode, Ar gas as sputtering. The aim of the research is to obtain the deposition effect of Ni-Cr and al by sputtering process and heat treatment process toward mechanical disposition of steel carbon ST 40. The sputtering process was done by two steps. The first step was sputtering process of nickel-chrome on the steel carbon ST 40 surface with the deposition time 60, 120, 180, 240 minutes. The second step was aluminium deposition time 30 minutes and gas argon flow for 88,6 ml/minute. Then, the researcher do heat treatment process by using oven and the temperature is 600 ºC for 30 minutes. The mechanical deposition test is the morphology of the surface, SEM/EDX test, and hardness test with Vickers method. the morphology of the surface showed the differences of the surface such as before thin film surface, before thin film surface and after reheating surface. SEM/EDX test showed the existence of layer that happen between steel carbon, nickel-chrome, and aluminium. The result of EDX Pure composition was 82,17% aluminium; 15,36% chrome; 2,46 % nickel and the result of EDX – Oxide is 87,68% Al2O3; 10,8%Cr2O3; and 1,52 % NiO. The hardness test showed that the hardness value is different between carbon steel ST 40 (171,960 HVN), nickel-chrome sputtering process with 60 minutes deposition time (191,256 HVN), nickel-chrome sputtering process with 60; 120; 240; 240 minutes deposition time and aluminium with 30 minutes deposition time (279,912; 253,056; 231,264; 213;888 HVN), and after heat treatment (318,504; 296,880; 256,224; 240,480 HVN). Keywords : Sputtering, Nickel-Chrome (Ni-Cr), Aluminium (Al), Steel Carbon, Heat Treatment, morphology of the surface, SEM/EDS, Hardness Vickers.

Item Type:	Thesis (Skripsi)
Uncontrolled Keywords:	Sputtering, Nickel-Chrome (Ni-Cr), Aluminium (Al), Steel Carbon, Heat Treatment, morphology of the surface, SEM/EDS, Hardness Vickers.
Subjects:	T Technology > TJ Mechanical engineering and machinery
Divisions:	Fakultas Teknik > S1 Teknik Mesin
Depositing User:	BAGUS RADIANT U
Date Deposited:	22 Oct 2025 08:01
Last Modified:	22 Oct 2025 08:01
URI:	http://eprints.ums.ac.id/id/eprint/52105

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