Analisis Sifat Kekerasan Lapisan Tipis Ni-Cr Pada Baja AISI 4140 Hasil Plasma Sputtering

Widiatmo, Widiatmo and -, Tri Widodo Besar Riyadi M.Sc.,Ph.D and -, Joko Sedyono, ST.MEng, Ph.D (2018) Analisis Sifat Kekerasan Lapisan Tipis Ni-Cr Pada Baja AISI 4140 Hasil Plasma Sputtering. Thesis thesis, Universitas Muhammadiyah Surakarta.

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Abstract

The production process in the industry uses equipment or machines made of metal, iron, steel. Sometimes the steel used does not have sufficient hardness and can be subjected to corrosion, therefore a coating process needs to be done. Reseach aims to determine the effect of the thin layer deposition of Ni-Cr on AISI 4140 steelsubstrate.The deposition process of Ni-Cr thin film on AISI 4140 steel substrate was carried out by sputtering technique. In sputtering technique, AISI 4140 substrate is placed on the anode and Ni-Cr target is placed on the cathode, nitrogen gas as reactive gas and argon gas as sputter gas. The deposition process of AISI 4140 is carried out by Ni-Cr coating with a variation of 60 and 150 minutes. Hardness testing results show that the value of hardness with a deposition time of 60 minutes is 137.84, HVN, deposition time is 150 minutes at 161.7 HVN. Corrosion rate testing results with 60 minutes deposition time of 0.74 mpy and 150 minutes deposition time of 4.86 (mpy). From the results of testing SEM (Scanning Electron Microscope) and EDX (Energy Dispersive X-Rayshows that there is a layer of Ni-Cr layer, this is indicated by the color difference on the surface of the specimen.

Item Type:	Karya ilmiah (Thesis)
Uncontrolled Keywords:	Sputtering, Nickel-Chromium, Steel AISI 4041, Hardness
Subjects:	T Technology > TJ Mechanical engineering and machinery
Divisions:	Fakultas Pasca Sarjana > Magister Teknik Mesin
Depositing User:	Unnamed user with username u100160014
Date Deposited:	14 Nov 2018 02:13
Last Modified:	14 Nov 2018 02:13
URI:	http://eprints.ums.ac.id/id/eprint/68719

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