Analisis Struktur Mikro dan Sifat Mekanik Lapisan NiCr-Al yang Dibentuk dengan Metode Sputtering pada Baja ST 40

Setiadi, Hari and , Tri Widodo Besar Riyadi. ST. MSc. Ph.D and , Agus Dwi Anggono, ST, M.Eng, Ph.D (2018) Analisis Struktur Mikro dan Sifat Mekanik Lapisan NiCr-Al yang Dibentuk dengan Metode Sputtering pada Baja ST 40. Thesis thesis, Universitas Muhammadiyah Surakarta.

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Abstract

The deposition process of NiCr and Al thin film on ST 40 substrate is done by sputtering technique. In the sputtering technique, the ST 40 substrate is placed on the anode and the NiCr and Al targets are placed at the cathode, nitrogen gas as reactive gas and argon gas as sputter gas. The ST 40 deposition process is carried out with 2 coatings. The first layer with NiCr with variations of time 60, 120, 180, and 240 minutes, then the second layer with Al with 30 minutes time. Then heated at 7500C for 30 minutes. The purpose of this research is to know the effect of NiCr and Al thin layer deposition on ST 40 substance. The experimental result is hardness, micro structure (SEM) and element composition (EDX). The characterization of the hardness value for ST 40 was 171.96 HVN, while the NiCr thin film for 60 min was 191.256 VHN, and 279,912 VHN (unheated NiCr 60 min, Al 30 min), 253.056 VHN (unheated NiCr 120 min, Al 30 min), 231,264 VHN (unheated NiCr 180 min, Al 30 min), 213,888 VHN (unheated NiCr 240 min, Al 30 min), 262,968 VHN (with N-Cr 60 heating minute, Al 30 min), 278,304 VHN (with heating NiCr 120 min, Al 30 min), 231,408 VHN (with heating NiCr 180 min, Al 30 min), 219,288 VHN (with NiCr 240 min heating, Al 30 minutes), and elemental composition on the layer with EDX-Pure obtained Al content = 82.17%; Cr = 15.36% and Ni = 2.46%. whereas by using EDX-oxide obtained Al = 46,41%; Cr = 7.39% and Ni = 1.19%.

Item Type:	Karya ilmiah (Thesis)
Uncontrolled Keywords:	Data, Informasi, Perpustakaan
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Divisions:	Fakultas Pasca Sarjana > Magister Teknik Mesin
Depositing User:	Unnamed user with username u100140018
Date Deposited:	06 Feb 2018 05:48
Last Modified:	06 Feb 2018 05:48
URI:	http://eprints.ums.ac.id/id/eprint/59343

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